CVD Reactors

As with films, there are a lot of ways to build a reactor. In this survey will cover a few of the more common varieties.

Introduction

• CVD Reactor Configurations

Tube Reactors

• Tube Reactor Overview
• Transport in Tube Reactors
• Tube Reactor Conclusions

Showerhead Reactors

• Showerhead Overview
• Transport in Showerhead Reactors
• Showerhead Heat Transport
• Showerhead Conclusions

High Density Plasma Reactor

• HDP Deposition Overview
• HDP Reactor Design Issues
• Transport in HDP Reactors
• Wafer Chucks for HDP
• HDP Conclusions

Linear Injector Atmospheric Pressure Reactor

• APCVD Reactor Overview
• Transport in APCVD Reactors
• APCVD Reactor Conclusions

• CVD Reactor Conclusions

Special topic: Vapor delivery

• Bubbler Overview
• How much goes out?
• Bubbler Problems
• Direct Liquid Injection
• Vapor Concentration Monitoring

Return to Tutorial Table of Contents
Book version of the CVD Tutorial