CVD Reactor Conclusions

Real commercial processes are always a balance between cost and quality. We're always making tradeoffs:
  • uniformity vs. throughput
  • film quality vs. throughput
  • film quality vs. precursor cost
  • versatility vs. reactor cost

The tradeoffs can be made more sensibly when we know what affects reactor operation:
  • diffusion vs. convection
  • surface reaction vs. transport
  • radiation vs. conduction
  • high pressure (speed but dust) or low pressure (uniform but slow)

AND...There's Always a Scapegoat: In the last resort, blame the reactor vendor. They're used to it.

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