APCVD Reactor Conclusions

Daniel M. Dobkin
CVD Reactor Conclusions

Bang for Buck
Real commercial processes are always a balance between cost and quality. We're always making tradeoffs:

uniformity vs. throughput
film quality vs. throughput
film quality vs. precursor cost
versatility vs. reactor cost

Basics Applied:

The tradeoffs can be made more sensibly when we know what affects reactor operation:

diffusion vs. convection
surface reaction vs. transport
radiation vs. conduction
high pressure (speed but dust) or low pressure (uniform but slow)

There's Always a Scapegoat:

In the last resort, blame the vendor. They're used to it.

Reactors: Table of Contents

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Bang for Buck	Real commercial processes are always a balance between cost and quality. We're always making tradeoffs: uniformity vs. throughput film quality vs. throughput film quality vs. precursor cost versatility vs. reactor cost

Basics Applied:	The tradeoffs can be made more sensibly when we know what affects reactor operation: diffusion vs. convection surface reaction vs. transport radiation vs. conduction high pressure (speed but dust) or low pressure (uniform but slow)

There's Always a Scapegoat:	In the last resort, blame the vendor. They're used to it.