Selected Shorts: Focused Reviews of Specialized Topics in Film Deposition and IC Fabrication

Table of Contents

Boron and Phosphorus Diffusion in Silicon Dioxide and Oxynitrides Moisture Barrier Effects in Deposited Oxides Gettering of Mobile Ions in Oxides Fixed Charge in Deposited Oxides Self-Aligned Contacts and Etch Stop Layers Field-Emission Flat Panel Display Manufacturing Tutorial

Useful links, comments, and criticisms are invited. Please direct them to:

Daniel M. Dobkin
dan@enigmatic-consulting.com

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