Selected Shorts:

Focused Reviews of Specialized Topics in Film Deposition and IC Fabrication

Table of Contents
Boron and Phosphorus Diffusion in Silicon Dioxide and Oxynitrides
Moisture Barrier Effects in Deposited Oxides
Gettering of Mobile Ions in Oxides
Fixed Charge in Deposited Oxides
Self-Aligned Contacts and Etch Stop Layers
Field-Emission Flat Panel Display Manufacturing Tutorial

Useful links, comments, and criticisms are invited. Please direct them to:

Daniel M. Dobkin
dan@enigmatic-consulting.com

 

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