| Plasmas for CVD |
Survey of Plasmas and Methods of Excitation
|
|
Implications for CVD
|
|
Some Technical Details
|
|
A bibliographical note: while numerous books on various aspects
of plasmas exist, the best one I'm aware of for people in the
semiconductor and materials processing industries is Principles
of Plasma Discharges and Materials Processing, by Michael
Lieberman and Allan Lichtenberg, Wiley 1994, ISBN 0-471-00577-0.
If you're looking for something shorter, the next choice [a bit
dated] is Dry Etching for VLSI, by A. van Roosmalen, J.
Baggerman and S. Brader, Plenum 1991, ISBN 0-306-43835-6.
|
