Daniel M. Dobkin

Fundamentals of Chemical Vapor Deposition

Chemistry for CVD

The Basics: Atoms, Molecules, and Bonds Introduction: Chemistry for CVD Atoms and Bonds Diatomic Molecules Hybrid Orbitals Thermodynamics and CVD Volatility Equilibrium Kinetics in the Gas and at the Surface   Kinetics Surface Chemistry Examples of real precursors

Table of Contents

BOOK VERSION OF THE CVD TUTORIAL

Go Home