Daniel M. Dobkin
Fundamentals of Chemical Vapor Deposition
Transport in Gaseous Media
Mass Transport
Introduction to Transport
Convection and Diffusion
Diffusion: Physics and Math
Diffusion Length
Convection and Reynolds Number
Plug Flow, Plug Reactor Model
Poiseuille and Couette Flow
Boundary Layer Flows
Pressure and Knudsen Number
Heat Transport
Introduction to Heat Transport
Heat Transfer Mechanisms
Heat Conduction and Diffusion
Heat Conduction and Plug Flow
Natural Convection
Radiative Heat Transport
Temperature Measurement
Table of Contents
BOOK VERSION OF THE CVD TUTORIAL
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