Daniel M. Dobkin

Fundamentals of Chemical Vapor Deposition

 

Transport in Gaseous Media

Mass Transport

Introduction to Transport
Convection and Diffusion
Diffusion: Physics and Math
Diffusion Length
Convection and Reynolds Number
Plug Flow, Plug Reactor Model
Poiseuille and Couette Flow
Boundary Layer Flows
Pressure and Knudsen Number

Heat Transport

Introduction to Heat Transport
Heat Transfer Mechanisms
Heat Conduction and Diffusion
Heat Conduction and Plug Flow
Natural Convection
Radiative Heat Transport
Temperature Measurement

 

 

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BOOK VERSION OF THE CVD TUTORIAL

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